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ECR Atom Source

Low-pressure operation ECR type atom source

It generates an atom flux from ECR-excited plasma. This atom source, based on the ECR method, has excellent low-pressure operating characteristics. This filamentless structure of the atom source can produce atom flux from gas species such as nitrogen, hydrogen, and oxygen.

• Company：アドキャップバキュームテクノロジー
• Price：Other

• Etching Equipment
• Evaporation Equipment
• Sputtering Equipment